The EddyCus® TF inline series measures layer properties such as metal layer thickness, sheet resistance, emissivity, residual moisture or grammage in non-contact on various substrates. Relevant substrates are glass, foil, paper, wafer, plastic or ceramic. Monitoring is done by permanent measurement or by trigger events to obtain equidistant results in fast moving coating processes. Monitoring solutions can be implemented either in atmosphere or vacuum conditions. Processes using eddy current technology benefit from high samples rates. Measurement results can be provided for process control systems using customer´s software. Additionally SURAGUS offers the monitoring software EddyCus® EC Control that visualizes, stores and analyses metrology data.
Advantages
Non-contact real time measurement
High measurement speed up to 1,000 measurements/ sec.
Fixed sensor installation or traversing sensor installation
Integration of 1 – 99 monitoring lanes per system
Process control at atmosphere or in vacuum
Measurements very close to the edge of the substrate are possible in many applications
Long term stability by temperature compensated measurements in changing environment
Large distances to the testing material (e.g. gap of 60 mm / 2.4 inch)
Characterization of covered conductive layers or encapsulated substrates
Numerous software integrated analysis and statistic functions
Easy set up by EddyCus® RampUp software incl. wizard for system calibration
Wear- free
Motivation for the Use of Inline Metrology
Process control and quality assurance
Process time optimization
Machine utilization
Material usage
Productivity
Product performance improvement