Surface topography and dynamic motion analysis and visualization are key to testing and developing microstructures such as MEMS devices (Micro-Electro-Mechanical Systems). They are indispensable for validating FE calculations, determining cross-talk effects and measuring surface deformation. The MSA-600 Micro System Analyzer is the all-in-one optical measurement workstation for characterizing surface topography as well as in-plane and out-of-plane motions.
The versions MSA-600-M/V cover frequency ranges up to 25 MHz, ideally suited for MEMS, MEMS microphones and other microsystems. The versions MSA-600-X/U cover the high and very high frequency range up to 2.5 GHz, perfect for the assessment of HF MEMS resonators, micro-acoustic devices like SAW, BAW and more.
Highlights
All-in-one optical measurement workstation for microstructures
Real-time response measurement (no post-processing required)
Versions MSA-600-M/V with up to 25 MHz
Versions MSA-600-X/U with up to 2.5 GHz
Unparalleled sub-pm displacement resolution
Fast measurement and visualization of deflection shapes
Straightforward and intuitive operation
Automated system for easy integration into probe stations
Import / export options for FE model validation
The MSA-600 Micro System Analyzer delivers increased measurement flexibility and precision, adapting to the needs of today’s and tomorrow’s microstructures. The Micro System Analyzer provides precise 3D dynamic and static response data that increases device performance while reducing development and manufacturing costs. Thus it enhances and shortens design cycles, simplifies trouble shooting and improves yield.