Real objects’ vibrations are usually three-dimensional. While you can indeed show preferential directions, production tolerances and other influences lead to movement components in other spatial directions too. You can use the MSA-100-3D Micro System Analyzer to analyze your sample’s dynamic behaviour in an integrated way, over a wide bandwidth and in real time. The vibration components in all three spatial directions are recorded simultaneously in high resolution and are analyzed as an integrated data record. You achieve the sub-picometer amplitude resolution typical of laser vibrometers regardless of the direction of vibration.
Highlights
Vibration measurement in real time with a high bandwidth of up to 25 MHz
Sub-picometer amplitude resolution for both out-of-plane and in-plane movements
Both single point and full-field measurements
Small laser spot of less than 4 μm enables maximum lateral resolution
Large stand-off distances of 38 mm
Compatible with common MEMS probe stations
Together with the high lateral resolution caused by a microscopic laser spot and the frequency bandwidth of up to 25 MHz, the Polytec MSA-100-3D is the ideal measuring device for characterizing microelectromechanical sensors and actuators (MEMS), other microstructures and biological samples. For full-field characterization the MSA-100-3D analyzes samples over the entire surface by having the software scan the sample and then graphically represent the deflection shapes.