High Accuracy Non-contact measuring system
Provides ultra-high accuracy with a linearity of ±0,5 μm over the entire measuring range (0,05 mm to 10 mm) and ±(0,3+0,1ΔD) μm in the narrow range.
Ultra-High repeatability of ±0,04 μm.
High scanning rate of 3200 scans/s
Resolution
(selectable):
0,00001 - 0,01 mm
Linearity at 20°C *¹:
Entire range :
± 0,5 μm
Narrow range :
±(0,3+0,1ΔD) μm
Positional error *²:
±0,5 μm
Measuring region:
2 x 10 mm (ø0,05-0,1 mm)
4 x 10 mm (ø0,1-10 mm)
Laser wavelength:
650 nm, Visible
Scanning rate:
3200 scans/s
Scanning speed:
113 m/s
Applicable laser standards:
IEC, FDA
Repeatability (±2ơ):
±0,04 μm
Inch-Metric:
Metric