Design Features
Full preload on all axes
Dual linear-motor-driven Y axes
Travel to 1.2 meter by 1.2 meter
Linear encoder or laser interferometer feedback
Active yaw control
Aerotech has a long history of engineering and manufacturing the world’s highest performance motion systems to directly address our customers’ key application needs. These efforts have helped to enable key technologies in a multitude of industries including semiconductor, medical, and military/aerospace. This extensive history and experience have culminated in the development of the ABL9000 air-bearing motion platform. Designed to meet the exacting requirements of wafer, flat panel display, and optical inspection and fabrication, the ABL9000 sets new standards of performance.
Air-Bearing Design
The ABL9000 incorporates an active preload on both vertical and horizontal surfaces. The opposing thin-film pressure maintains the bearing nominal gap tolerance. This design, in addition to the large air-bearing surface that distributes the load over a large surface area, results in a stage with outstanding stiffness that is ideal for heavy or offset loading.