Design Features
Large, clear aperture
Travel range from 100 mm x 100 mm to 400 mm x 400 mm
High-performance linear motion guides
15 arc sec orthogonality
Noncontact linear encoder for high accuracy
The demand for a high accuracy, robust, open-frame stage is met with the ATS3600. This dual-axis, large aperture, open-frame stage addresses the unique needs of scanning microscopy, wafer and printed circuit board inspection and automated assembly.
Design and Construction
Unlike other designs that are assembled from several discrete pieces, the ATS3600 is a three-piece design. This allows critical components such as orthogonality, straightness and flatness to be controlled during the initial machining, resulting in a stage with exceptional geometrical tolerances and inherent orthogonality.