Electric actuator ABL3600

linearfor aircraftwith servo-motor

Design Features Large clear aperture Full preload on all axes Dual linear-motor-driven X and Y axes Noncontact linear encoder for high accuracy The ABL3600 dual-axis, large aperture, open-frame, air-bearing stage addresses the unique needs of scanning microscopy and mask and wafer inspection. Design and Construction The combination of high stiffness air bearings and dual linear-motor-driven axes provides an XY open-frame stage with exceptional performance characteristics. The ABL3600 represents a major upgrade in performance over traditional mechanical bearing open-frame stages. As with all Aerotech air-bearing systems, proprietary manufacturing techniques are used to produce stages with unsurpassed geometric characteristics including straightness, flatness, pitch, roll and yaw. The ABL3600 is manufactured in Aerotech’s state-of-the-art production facility and is machined with exacting tolerances that are unachievable by conventional methods.