Design Features
Integrated, low-profile, XY, linear-motor stage with clear aperture
Excellent geometric performance (straightness to ±0.5 µm, flatness to ±1.25 µm)
Optimized for high-dynamic applications
Speeds to 2 m/s and accelerations to 2g
Integrated cable management
Large selection - nine models in travel and accuracy
Aerotech’s PlanarDLA-series stages offer a clear aperture, high dynamics, and exceptional geometric performance in a compact, low-profile package. These stages are essential for applications ranging from two-sided LED wafer processing where high-dynamics and micrometer-level straightness are required, to quasi-static optical metrology where high-accuracy and precise geometric performance are necessary. Regardless of the application, the PlanarDLA is designed to meet a variety of application needs with an array of configurable options.
Ultra-Precise Stage Design
The PlanarDLA XY design provides for unparalleled planar geometric performance in applications where straightness and flatness of motion are critical. High-precision roller bearings, precision-machined surfaces, and noncontact direct-drive linear motors driving through the axes’ center-of-stiffness result in a positioning stage with exceptional geometric tolerances (straightness to ±0.5 µm and flatness to ±1.25 µm).