Design Features
Integrated, low-profile, XY, linear-motor stage
Excellent geometric performance (straightness to ±0.4 µm; flatness to ±1 µm)
Anti-creep, precision crossed-roller bearings
Large selection – nine models in travel and accuracy
Aerotech’s PlanarDL-series stages offer excellent geometric and dynamic performance in a compact, low-profile package. A variety of travel and performance options make this stage ideal for applications ranging from surface profilometry to LED wafer scribing.
Superior Stage Design
The PlanarDL XY design allows for industry-leading planar geometric performance in applications where straightness and flatness of motion are critical. High-precision anti-creep crossed-roller bearings, precision-machined surfaces and Aerotech linear motors driving through the axes’ center-of-stiffness result in a positioning stage with exceptional geometric tolerances.