Design Features
Integrated low-profile XY linear motor stage
Nanometer-level performance in a large travel format
High resolution (1 nm), repeatability (75 nm), and accuracy (250 nm)
In-position stability of <1 nm
Anti-creep crossed-roller bearings
High dynamic performance with direct-drive technology
ULTRA performance grade option
Introduction
The ANT130XY series stages offer nanometer-level performance in XY travels up to 160 mm. The integrated, sleek design provides an extremely low profile of only 85 mm. The stage comes with proprietary direct-drive motor technology, noncontact linear encoders, limits, integrated cable management system, and three performance grades.
Ultra-Precise Stage Design
The ANT130XY design allows critical elements such as orthogonality, straightness, and flatness to be optimized, resulting in a stage with exceptional geometric tolerances. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion in both the X and Y dimensions. All travel options (60 mm x 60 mm, 110 mm x 110 mm, 160 mm x 160 mm) come with the 85 mm profile height. The integrated cable management system is designed for long life and to minimize drag forces