Design Features
Long life linear motion guide bearing system
Ultra-fine resolution
Integral bellows waycovers
Low-profile compact design
Submicron accuracy
Optional high-accuracy linear encoder
The ATS150 series motor-driven linear stages provide the high resolution and repeatability required for semiconductor wafer testing and fabrication, automated microscope inspection systems and precision micromachining applications.
Construction Features
ATS150 series stages are machined from a special cast aluminum alloy to provide a high strength-to-weight ratio and long-term stability. The base is a box design that provides exceptional stiffness and stability.
ATS150 series stages employ a precision-ground ball screw that is pre-loaded to eliminate backlash, and its nut has wipers to prevent contamination and maintain high accuracy throughout the life of the stage. High quality, pre-loaded duplex bearings are used to eliminate axial play.