Design Features
Compact 75 mm width with travel to 100 mm
Precision ground ball-screw drive
DC servo or stepper motor
Anti-creep crossed-roller bearings
High resolution (0.1 µm), repeatability (±0.75 µm) and accuracy (±1.0 µm)
High-vacuum compatible
Optional bellows waycovers
Compact multi-axis configurations
The MPS75SL is a compact, high-performance linear positioning stage that is perfect for the confines of the laboratory while providing the high reliability required in a production environment. It is the ideal choice for measurement, testing, accurate alignment and component assembly.
High Accuracy
The precision ground ball-screw provides exceptional accuracy, repeatability and ultra-fine positioning resolution capability to 0.1 micron. The DC servomotor is equipped with a rotary encoder. The anti-creep crossed-roller linear bearings provide smooth travel and excellent payload characteristics.