Design Features
Bi-directional repeatability to 75 nm
Direct-drive linear motor for ultra-precise motion
High-accuracy noncontact glass-scale linear encoder
Anti-cage-creep crossed-roller bearings for smooth motion
Outstanding performance in a small footprint
The ALS130H, with its sub-nanometer resolution, superior bidirectional repeatability and exceptional low-velocity performance, is the unparalleled solution for high performance test, measurement, inspection and other demanding applications.