Design Features
Nanometer-level performance in a large travel format
High resolution (1 nm), repeatability (75 nm) and accuracy (250 nm)
In-position stability of <1 nm
Anti-creep crossed-roller bearings
High dynamic performance
Large selection - 8 models in travel and accuracy
The ANT130L series stages offer nanometer-level performance in travels up to 160 mm. With its low profile and outstanding performance characteristics, the ANT130L is the ultimate solution for high-accuracy alignment, inspection, positioning, and measurement stations.