Design Features
Nanometer-level performance in a large travel format
High resolution (1 nm), repeatability (75 nm) and accuracy (250 nm)
In-position stability of <1 nm
Anti-creep crossed-roller bearings
High dynamic performance
Introduction
Aerotech’s ANT95L series stages are the world’s first nanometer-level positioning systems with greater than 25 mm travel. The ANT95L and ANT95L-PLUS crossed-roller stages are the best-in-class in combining speed, accuracy, resolution, repeatability, reliability and size, and are offered in two accuracy grades. These linear stages exhibit up to 5 g acceleration, 500 mm/s velocity, enhanced load capacity and are available with standardized, universal base mounting patterns that allow their use in a wide range of configurations.