Design Features
Designed for high-performance scanning and inspection
Active air preload on all air bearing surfaces
Linear encoder feedback provides subnanometer resolution
High stiffness for heavy loads and excellent geometric performance
Travel up to 500 mm
Leading-edge manufacturing, particularly in the semiconductor and data storage industries, demands positioning tolerances beyond the capability of conventional ball-screw and mechanical-bearing positioning systems. The ABL1500 air bearing stage, with its fully active preload, exceptionally high stiffness and excellent geometric characteristics was designed specifically to meet those demands.